2 article(s) from Saito, Hiroshi
Angstrom-scale flatness using selective nanoscale etching
- Takashi Yatsui,
- Hiroshi Saito and
- Katsuyuki Nobusada
Beilstein J. Nanotechnol. 2017, 8, 2181–2185, doi:10.3762/bjnano.8.217
Surface improvement of organic photoresists using a near-field-dependent etching method
- Felix J. Brandenburg,
- Tomohiro Okamoto,
- Hiroshi Saito,
- Benjamin Leuschel,
- Olivier Soppera and
- Takashi Yatsui
Beilstein J. Nanotechnol. 2017, 8, 784–788, doi:10.3762/bjnano.8.81
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